It truly is assumed that in some instances, secondary thermal ALD reactions with the gaseous by-items can cause an seemingly improved conformality than may be reached using a “pure” plasma approach. For instance, experimental film thickness profiles received for PE-ALD of Al2O3 by Dendooven et al. m). In cases like https://ald-industry48148.bleepblogs.com/25180915/detailed-notes-on-atomic-layer-deposition